課程資訊
課程名稱
奈米光電半導體製程技術
Nano Optoelectronics Semiconductor Processing Technology 
開課學期
99-2 
授課對象
電機資訊學院  光電工程學研究所  
授課教師
吳志毅 
課號
OE5030 
課程識別碼
941 U0390 
班次
 
學分
全/半年
半年 
必/選修
選修 
上課時間
星期二6,7,8(13:20~16:20) 
上課地點
明達205 
備註
總人數限100人。
總人數上限:100人 
Ceiba 課程網頁
http://ceiba.ntu.edu.tw/992OE5030 
課程簡介影片
 
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課程概述

Advanced nano-scale semiconductor technology
1.Advanced optical lithography and none-optical lithography: E-beam lithography, nano-imprint, and self-assembly process
2.Advanced CMOS: High-k gate oxide and metal gate
3.Advanced interconnect: Low-k materials and Cu process
4.Strained silicon in CMOS technology
5.SOI technology
6.SiGe and its application
7.Atomic-Scale Thin Films Deposition Techniques: Atomic Layer Chemical Vapor Deposition (ALCVD)
8.Characterization Techniques for Nano-science

Opto-electronic semiconductor technology
1.TFT-LCD technology
2.Conventional LED
3.Short-wavelength and white LED: GaN based LED
4.Organic LED
5.Digital camera: CCD vs. CMOS
6.Solar cell
7.Atomic-Scale Thin Films Deposition Techniques: Molecular Beam Epitaxy (MBE)
 

課程目標
This is a new course which will introduce some of the modern semiconductor technology in both electronics and optical-electronics area. The content of the course can be separated into two main categories: (1) Advanced nano-scale semiconductor technology and (2) Optical-electronic semiconductor technology. The students who want to take this course need to have basic knowledge in semiconductor process technology. 
課程要求
Grading:Homework, Midterm, and Final Exam
Prerequisite:Semiconductor engineering 
預期每週課後學習時數
 
Office Hours
 
指定閱讀
 
參考書目
Textbook: No text book. Lecture note will be handed out in each class. 
評量方式
(僅供參考)
   
課程進度
週次
日期
單元主題
第0週
07/02  期末成績